Homogeneity Analysis of High Yield Manufacturing Process of Mems-based Pzt Thick Film Vibrational Energy Harvesters
نویسندگان
چکیده
This work presents a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibrational energy harvesters aimed towards vibration sources with peak frequencies in the range of a few hundred Hz. By combining KOH etching with mechanical front side protection, SOI wafer to accurately define the thickness of the silicon part of the harvester and a silicon compatible PZT thick film screen-printing technique, we are able to fabricate energy harvesters on wafer scale with a yield higher than 90%. The characterization of the fabricated harvesters is focused towards the full wafer/mass-production aspect; hence the analysis of uniformity in harvested power and resonant frequency.
منابع مشابه
VIBRATION ENERGY HARVESTERS OF LEAD-FREE (K,Na)NbO3 PIEZOELECTRIC THIN FILMS
In this study, we fabricated piezoelectric energy harvesters composed of lead-free (K,Na)NbO3 (KNN) thin films and compared the power generation performance with PZT-thin film energy harvesters. Both of the piezoelectric thin films were deposited on Pt/Ti/Si cantilevers by rf-sputtering. The KNN and PZT thin films had perovskite structure, and showed the relative dielectric constants of 744 and...
متن کاملMEMS power generator with transverse mode thin film PZT
A thin film lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), MEMS power generating device is developed. It is designed to resonate at specific frequencies from an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device i t 2 f 1 d r ©
متن کاملA Pzt Multilayer Thick-film Actuator for Ultrasonic Applications
In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.
متن کاملTemperature effects on output power of piezoelectric vibration energy harvesters
The performance of piezoelectric vibration energy harvesters was studied as a function of environment temperature. The devices fabricated by soft or hard PZTs were used to investigate the effect of material parameters on the thermal degradation of the devices. PZT MEMS device was also prepared and compared with the bulk devices to investigate scaling effect on the thermal degradation. All devic...
متن کاملConception of an Interdigitated Electrodes Based Cantilever for Piezoelectric Energy Harvesting
This paper reports on conception, simulation, and fabrication of a lead zirconate titanate (PZT) MEMS cantilevers for piezoelectric energy harvesting (EH). We investigate the advantages of interdigitated electrode configurations (IDE) with respect to parallel-plate electrodes (PPE) in terms of output voltage and output power from the constitutive equations of piezoelectricity. Finite element mo...
متن کامل